Analysis of Mass Based Micro Cantilever Using Comsol
نویسندگان
چکیده
--MEMS based mass sensors are being designed to identify the small amounts of materials especially for monitoring the food supply. The Fabrication of MEMS includes deposition of material layers, pattering by photolithography and etching to produce the required shapes, consequently leading to time taking and expensive method. In order to reduce the working time of sensor to market a Finite element analysis (FEA) software was developed to identify possible problem at early stage in design cycle before proceed to fabrication. In this paper COMSOL Multiphysics FEA software was used to model the microcantilever based mass sensor. Using microcantilever, mass can be detected either in static mode or in dynamic mode. A model was designed in order to increase the sensitivity and measure the number of molecules attached to the surface. As a result a rectangular shaped microcantilever with specific dimensions was designed to identify the mass in smaller range. Keywords----MEMS, FEA, COMSOL, Microcantilever
منابع مشابه
Impact of Beam Thickness and Air Gap on the Performance of Cantilever MEMS Switch
This paper represents the impact of beam thickness and air gap upon the performance of cantilever MEMS switches having different beam materials (Al, Au metals). A comparative analysis of spring constant, effective mass, pull-in voltage, capacitance of cantilever based MEMS switch has been performed by 3D simulation using COMSOL Multiphysics based on Finite Element Method [FEM]. Different parame...
متن کاملA mechanical micro molecular mass sensor
One of the bio-sensing mechanisms is mechanical. Rather than measuring shift in resonance frequency, we adopt to measure the change in spring constant due to adsorption, as one of the fundamental sensing mechanism. This study explains determination of spring constant of a surface functionalized micro machined micro cantilever, which resonates in a trapezoidal cavity-on Silicon wafer, with the ...
متن کاملA mechanical micro molecular mass sensor
One of the bio-sensing mechanisms is mechanical. Rather than measuring shift in resonance frequency, we adopt to measure the change in spring constant due to adsorption, as one of the fundamental sensing mechanism. This study explains determination of spring constant of a surface functionalized micro machined micro cantilever, which resonates in a trapezoidal cavity-on Silicon wafer, with the ...
متن کاملNumerical investigation of band gaps in 3D printed cantilever-in-mass metamaterials
In this research, the negative effective mass behavior of elastic/mechanical metamaterials is exhibited by a cantilever-in-mass structure as a proposed design for creating frequency stopping band gaps, based on local resonance of the internal structure. The mass-in-mass unit cell model is transformed into a cantilever-in-mass model using the Bernoulli-Euler beam theory. An analytical model of t...
متن کاملDevelop A Vibration Based MEMS Piezoelectric Energy Harvester Using Micro Cantilever Beam
Energy harvester is a self-generating energy source which is able to run small scale electronic devices. It largely reduces the dependency on external power source. This paper represents the utilization of micro cantilever beam to develop a vibration based electromechanical systems (MEMS) piezoelectric energy harvester system. The proposed micro cantilever part has been developed by finite elem...
متن کامل